Hexapod
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IMA 11 HP
The major features of this hexapod are hereafter summarized:
  • payload = 300 Kg
  • X,Y displacement stroke = +/- 22 mm
  • Z displacement stroke = +/- 46 mm
  • Rx,Ry angular stroke = +/- 3 deg
  • Rz angular stroke = +/- 5 deg
  • min incremental step = 0.75 um (X,Y), 0.3 um (Z)
  • min incremental rotation = 0.2 arcsec (Rx,Ry)
  • repeatability (on 100 um steps) < 1 um 
 
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